Research and Technological Progress of Millimeter Wave/Terahertz MEMS Switches
ZHANG Bo, LI Yitong, ZHANG Naibo, SONG Ruiliang, DENG Kun, YANG Guangyao, LIU Jun
RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS . 2025, (1): 0 .  DOI: 10.12450/j.gtdzx.202501005