基于MOCVD的β‑Ga<sub>2</sub>O<sub>3</sub>同质外延与Al掺异质结外延生长研究进展

LIU Yang¹, HE Yunlong¹, CHEN Guran², LU Xiaoli¹, ZHENG Xuefeng¹, MA Xiaohua¹, HAO Yue¹

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS . 2025, (1): 0 . DOI: 10.12450/j.gtdzx.202501001