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中文
A Wafer-level Packaged MEMS Digital Attenuator
SUN Junfeng, JIANG Lili, LIU Shuiping, YU Yuanwei, ZHU Jian, LI Ming, CHEN Zhangyu
RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS . 2023, (
4
): 353 -358 .
