Review of Technology for Extending the Travel Range of Electrostatic Micro-actuator

FEI Hongxin, FANG yuming, WU Xupeng, CAI Teng, ZHAO Jiang, LI Ruozhou

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (5) : 405-411.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (5) : 405-411.
Micro-nano Technology

Review of Technology for Extending the Travel Range of Electrostatic Micro-actuator

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(5): 405-411

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