Deep Etching and Morphology Improvement of 4H-SiC

DONG Zhihua, LIU Hui, ZENG Chunhong, ZHANG Xuan, SUN Yuhua, CUI Qi, CHENG Zhiqun, ZHANG Baoshun

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (3) : 239-243.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (3) : 239-243.
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Deep Etching and Morphology Improvement of 4H-SiC

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(3): 239-243

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