Study on Molecular Beam Epitaxy of GaAs M-HEMT and Si HEMT Materials

MA Ben, SHEN Yifan, WANG Wei, YU Hailong, YIN Zhijun, GAO Hanchao, LI Zhonghui

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (3) : 230-233.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (3) : 230-233.
Material & Technologys

Study on Molecular Beam Epitaxy of GaAs M-HEMT and Si HEMT Materials

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(3): 230-233

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