Influence of SEE with Heavy Ions on Reliability of Ultra-thin Gate Oxide Layer

HE Yujuan, LEI Zhifeng, ZHANG Zhangang, ZHANG Xiaowen, YANG Yintang

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (2) : 141-145.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (2) : 141-145.
Si Microelectronics

Influence of SEE with Heavy Ions on Reliability of Ultra-thin Gate Oxide Layer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(2): 141-145

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