Orientation-controlled Mg2Si Films Fabricated by Layered Sputtering

LIAO Yangfang, XIE Quan

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (1) : 38-43.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2022, Vol. 42 ›› Issue (1) : 38-43.
Optoelectronics

Orientation-controlled Mg2Si Films Fabricated by Layered Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 42(1): 38-43

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