Study on Fabrication of Low Stress Scandium-doped Aluminum Nitride

WANG Lei, WANG Dongrui, SHEN Yanfei, JIANG Lili, YU Yuanwei, HUANG Min

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2021, Vol. 41 ›› Issue (4) : 319-322.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2021, Vol. 41 ›› Issue (4) : 319-322.
Material & Technologys

Study on Fabrication of Low Stress Scandium-doped Aluminum Nitride

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(4): 319-322

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