Progress of Silicon-based Heterogeneous 3D Integration Technologies

YU Yuanwei

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2021, Vol. 41 ›› Issue (1) : 1-9.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2021, Vol. 41 ›› Issue (1) : 1-9.
3D Integrated RF Microsystem

Progress of Silicon-based Heterogeneous 3D Integration Technologies

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(1): 1-9

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