Electron Beam Induced Conductivity of the Dielectric and Polymer Films

HUO Zhisheng, PU Hongbin, LI Weiqin

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2020, Vol. 40 ›› Issue (2) : 87-93.

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PDF(589 KB)
RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2020, Vol. 40 ›› Issue (2) : 87-93.
Device Physics & Device Simulation

Electron Beam Induced Conductivity of the Dielectric and Polymer Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 40(2): 87-93

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