Research on Si‑based Low‑loss Slow‑wave Structures for THz TWT Fabricated by DRIE Technology

WU Jie, YANG Yang, LIU Xin, YAN Ke, ZHENG Yuan, FENG Kun, WANG Zhengyan, JIANG Lili, HUANG Min, LI Zhonghui, ZHU Jian, CHEN Tangsheng

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (5) : 369-373.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (5) : 369-373. DOI: 10.12450/j.gtdzx.202405001
Solid-state Terahertz Devices & Applications

Research on Si‑based Low‑loss Slow‑wave Structures for THz TWT Fabricated by DRIE Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 44(5): 369-373 https://doi.org/10.12450/j.gtdzx.202405001

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