A Study on Inductively Coupled Plasma Etching Process of Platinum Electrode

SONG Lin, ZHOU Yanping, ZUO Chao, KAMIMURA Ryuuichirou, YANG Bingjun

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (3) : 264-268.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (3) : 264-268. DOI: 10.12450/j.gtdzx.202403014
Device & Material & Technology

A Study on Inductively Coupled Plasma Etching Process of Platinum Electrode

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 44(3): 264-268 https://doi.org/10.12450/j.gtdzx.202403014

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