Influence of High Temperature Annealing on the Crystal Quality of AlN Epitaxial Layers

LUO Weike, WANG Yi, LI Liang, LI Chuanhao, ZHANG Dongguo, YANG Qiankun, PENG Daqing, LI Zhonghui

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (2) : 167-172.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (2) : 167-172. DOI: 10.12450/j.gtdzx.202402012
Device & Material & Technology

Influence of High Temperature Annealing on the Crystal Quality of AlN Epitaxial Layers

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 44(2): 167-172 https://doi.org/10.12450/j.gtdzx.202402012

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