Method of Rapid Prediction about Metal Gate Workfunction Variability Effect and Its Verification

LI Yining, YANG Lanlan, Tu Yan

RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (1) : 65-71.

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RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS ›› 2024, Vol. 44 ›› Issue (1) : 65-71. DOI: 10.12450/j.gtdzx.202401012
Device & Material & Technology

Method of Rapid Prediction about Metal Gate Workfunction Variability Effect and Its Verification

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 44(1): 65-71 https://doi.org/10.12450/j.gtdzx.202401012

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