基于脉冲激光沉积的非晶IGZO场效应晶体管的性能优化

梅佳旺, 李调阳

Performance Optimization of Amorphous IGZO Field‑effect Transistors Fabricated Using Pulsed Laser Deposition

MEI Jiawang, LI Tiaoyang

固体电子学研究与进展 . 2025, (1): 0 . DOI: 10.12450/j.gtdzx.202501011