拉伸应变下SiC/SiO2近界面碳缺陷的结构和电学特性演变
马玉洁, 刘涵, 张圆, 崔鹏飞, 苏艳, 王德君
Effect of Tensile Strain on the Structure and Electronic Properties of Carbon Related Defects Near the SiC/SiO2 Interface
MA Yujie, LIU Han, ZHANG Yuan, CUI Pengfei, SU Yan, WANG Dejun
固体电子学研究与进展
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2024, (3): 206
-212
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DOI: 10.12450/j.gtdzx.202403004
