基于Au/In键合的静电扭转微镜的设计与工艺研究
王俊铎, 胡钰玮, 吴永强, 单亚蒙, 钱磊, 沈文江
Design and Process Study of Electrostatic Torsion Micromirror Based on Au/In Bonding
WANG Junduo, HU Yuwei, WU Yongqiang, SHAN Yameng, QIAN Lei, SHEN Wenjiang
固体电子学研究与进展
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2024, (3): 252
-257
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DOI: 10.12450/j.gtdzx.202403012
