偏压应力下SiC/SiO界面间隙碳缺陷的结构和电学性质演变

张圆

Effect of Electric Field on the Structural and Electronic Properties of Carbon Interstitial Defects at SiC/SiO Interface

ZHANG Yuan

固体电子学研究与进展 . 2023, (3): 208 -213 .