A high-precision digital temperature sensor circuit based on a 0.18 μm CMOS process was introduced. In the temperature-sensing front-end module， by adopting dynamic matching technology and chopper technology， as well as a dopting hybrid first-order sigma-delta/SAR ADCs， the power consumption was reduced， while the higher resolution was achieved and the sampling accuracy of the temperature sensor was improved. After simulation and testing， the high-precision digital temperature sensor circuit based on hybrid ADC presented in this paper provides 16 bit temperature results and achieves ±0.1°C accuracy over a temperature range of -25°C to 55°C without calibration. The effect of self-heating on temperature measurement accuracy is greatly reduced by enabling control， and the maximum current is only 5 μA over a voltage range of 1.7 V to 5.5 V. While achieving high accuracy， the cost and power consumption are reduced.
[1] 陈刚，解玉凤，林殷茵.一种新型高精度宽电压范围的CMOS温度传感器［J］.固体电子学研究与进展，2013，33（2）：175-178. [2] 王子轩，王鑫，黄康琪，等.一种高速高能效时域温度传感器［J］.固体电子学研究与进展，2022，42（1）：50-57. [3] MeijerG C M. Thermal sensors based on transistors ［J］. Sensors & Actuators，1986，10（1）：103-125. [4] BakkerA，HuijsingJ. High-Accuracy CMOS Smart Temperature Sensors ［M］. Berlin：Springer，2010：6?7. [5] ManK L， BermakA， LuongH C. A sub- μ W embedded CMOS temperature sensor for RFID food monitoring application［J］. Solid-state Circuits，2010，45（10）： 1246-1255. [6] ChenP，ChenC C，PengY H，et al. A time-domain SAR smart temperature sensor with curvature compensation and a 3σ inaccuracy of -0.4℃～+0.6℃ over a 0℃ to 90℃ range［J］. IEEE Journal of Solid-state Circuits，2010，45（3）：600-609. [7] 张艳飞，曹正州. 一种集成于系统芯片的低功耗温度传感器设计［J］. 电子与封装， 2020， 20（11）： 43?48. [8] RiedijkF R， HuijsingJ H. An integrated absolute temperature sensor with sigma-delta A-D conversion［J］. IEEE Sensors Journal， 1992， 34： 249?256. [9] 阳佳丽， 赵新， 高博，等. 基于双极型晶体管的温度传感器［J］. 电子与封装， 2022， 22（9）： 41?45. [10] LawM K，LuF S，WuT，et al. A 1.1 μm CMOS smart temperature sensor with an inaccuracy of ±0.2°C （3σ） for clinical temperature monitoring ［J］. IEEE Sensors Journal， 2016，16（8）： 2272-2281. [11] 徐凯英，丁宁，孔祥艺，等.一种低功耗多模式 AB 类音频放大器的设计［J］.电子与封装， 2022， 22（11）：52?55. [12] 廖望，侯江，郭亮，等.一种高精度低功耗数字温度传感器［J］.微电子学，2022，52（2）：318-322.
PDF(695 KB)
