对柔性压力传感器进行了设计和研究,总体采用三明治式结构,介质层选择了复眼微结构的设计方式,电极层则需要在改性后的PDMS表面溅射一层金属银。将制备的三层结构通过键合的方式组成响应速度和灵敏度均较高的传感器。该传感器的测试结果为：当传感器表面压力一定时,复眼结构的电容式压力传感器的灵敏度达到了0.28 kPa-1,响应时间和恢复时间分别为58 ms和43 ms,迟滞性参数均小于7%,经过12 000次的撞击实验,传感器仍然能保持稳定的输出。制备的传感器具有较强的响应特性、良好的恢复性和稳定性,能够适应柔性可穿戴电子器件的应用需求。
Abstract
The flexible pressure sensor was designed and studied. Generally, the sandwich structure was adopted. The dielectric layer adopted the design method of compound eye microstructure, and the electrode layer needed to sputter a layer of metal silver on the surface of the modified PDMS. The prepared three-layer structure was bonded to form a sensor with high response speed and sensitivity. The test results of the sensor are as follows： when the surface pressure of the sensor is constant, the sensitivity of the capacitive pressure sensor with compound eye structure reaches 0.28 kPa-1, the response time and recovery time are 58 ms and 43 ms respectively, and the hysteresis parameters are less than 7%. After 12 000 impact experiments, the sensor can still maintain a stable output. The prepared sensor has strong response characteristics, good recovery and stability, and can meet the application requirements of flexible wearable electronic devices.
关键词
电容式传感器 /
压力传感器 /
复眼结构 /
重复性测试 /
动态检测
{{custom_keyword}} /
Key words
capacitive sensor /
pressure sensor /
compound eye structure /
repeatability test /
motion detection
{{custom_keyword}} /
中图分类号：
TP212
{{custom_clc.code}}
({{custom_clc.text}})
{{custom_sec.title}}
{{custom_sec.title}}
{{custom_sec.content}}
参考文献
[1] 刘智勇, 邓惠丹, 熊美明,等. 高性能碳化棉纤维柔性压力传感器制备与应用[J]. 华中科技大学学报(自然科学版), 2022, 50(03): 80-86.
[2] 侯丽娟, 秦会斌, 胡炜薇. 基于微结构的柔性电容式压力传感器设计与仿真研究[J]. 传感器与微系统. 2021, 40(12): 66-68.
[3] 陈广州, 陈刚, 潘莉,等. 基于PVDF/GO纳米复合薄膜的柔性压电传感器[J]. 微纳电子技术, 2022, 59(03): 236-241.
[4] 刘波, 谢锐. 电容式扭矩传感器的微小电容检测系统设计[J]. 传感器与微系统, 2022, 41(01): 93-95.
[6] 周帅, 刘茜. 基于微结构提升柔性电容式压力传感器灵敏度的研究现状[J]. 微纳电子技术. 2021, 58(12): 1047-1053.
[7] Leung C M, Chen X Q, Wang T, et al. Enhanced electromechanical response in PVDF-BNBT composite nanofibers for flexible sensor applications[J]. Materials, 2022, 15(5): 1-8.
[8] Zhao H, Bai J B.Highly sensitive piezo-resistive graphite nanoplatelet-carbon nanotube hybrids/ polydimethylsilicone composites with improved conductive network construction[J]. ACS Applied Materials & Interfaces. 2015, 7(18): 9652-9659.
[9] Kou H R, Zhang L, Tan Q L, et al.Wireless flexible pressure sensor based on micro-patterned Graphene/PDMS composite[J]. Sensors & Actuators: A. Physical, 2018, 277: 150-156.
[10] Cui J L, Duan J P, Zhang B Z, et al.Flexible pressure sensor with a “V-type” array microelectrode on a grating PDMS substrate[J]. Sensor Review, 2016, 36(4): 397-404.
[11] Ahmed E, Vipul S, Kyriacos Y, et al.Plant-based biodegradable capacitive tactile pressure sensor using flexible and transparent leaf skeletons as electrodes and flower petal as dielectric layer[J]. Advanced Sustainable System, 2020, 4(9): 1-9.
[12] 白成, 耿达, 周伟. 高性能电阻型柔性压力传感器研究进展[J]. 微纳电子技术, 2021, 58(07): 559-570.
[13] 刘双斌, 秦会斌. 柔性阵列式压力传感器的制备研究[J]. 传感器与微系统. 2021,40(09): 34-36.
[14] 李明星, 姚佳楠, 刘江,等. 基于磨砂玻璃压印的压阻式柔性压力传感器[J]. 固体电子学研究与进展. 2021, 41(02): 154-159.
[15] 刘雨晴. 基多重响应柔性电子皮肤的研制[D]. 长春: 吉林大学, 2020.
{{custom_fnGroup.title_cn}}
脚注
{{custom_fn.content}}
基金
*河南省科技厅科技研究项目-科技攻关（212102210015）; 河南省高等教育教学改革研究与实践项目-重点项目（2021SJGLX676）
{{custom_fund}}
PDF(3921 KB)
